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Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement
Authors
Hartgenbusch, N.
Borysov, M.
Jedermann, R.
Lang, W.
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[BibTeX]
Year: 2020, Reviewed
In: IEEE Sensors Journal
Volume 20, Issue 9
Pages: 4602-4609
DOI:
10.1109/JSEN.2020.2965332
Hartgenbusch, N.; Borysov, M.; Jedermann, R.; Lang, W.
Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement
In: IEEE Sensors Journal, 20(2020)9, pp. 4602-4609
(Workgroup:
IMSAS
)
BibTeX
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@article{Har20a, author = {Hartgenbusch, N. and Borysov, M. and Jedermann, R. and Lang, W.}, title = {Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement}, journal = {IEEE Sensors Journal}, year = {2020}, volume = {20}, number = {9}, doi = {10.1109/JSEN.2020.2965332}, pages = {4602-4609} }
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