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An Optimized Single Mask Process for Movable Bulk Silicon Micromachining Devices

Authors

Alamin Dow, A. B.
Rangelow, I. W.

Meta information [BibTeX]

Year: 2009, Reviewed
Conference: 3rd Smart System Integration Conference in Brussels, Belgium (March 10-11, 2009)

Alamin Dow, A. B.; Rangelow, I. W.
An Optimized Single Mask Process for Movable Bulk Silicon Micromachining Devices
2009,
(Workgroups: IMSAS, IGS)

@inproceedings{Ala09a,
author = {Alamin Dow, A. B. and Rangelow, I. W.},
title = {An Optimized Single Mask Process for Movable Bulk Silicon Micromachining Devices},
booktitle = {},
year = {2009},
editor = {},
publisher = {},
doi = {},
pages = {}
}

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Contributions to Conferences

An Optimized Single Mask Process for Movable Bulk Silicon Micromachining Devices

Authors

Meta information [BibTeX]