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Development and Optimization of ICP-RIE Parameters for Deep Silicon Microfluidic Systems

Authors

Alamin, A. B.
Sklorz, A.
Benecke, W.
Lang, W.

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Year: 2008, Reviewed
In: 19th MME Europe Workshop
Conference: 19th MME Europe Workshop in Aachen, Germany (September 28-30, 2008)

Alamin, A. B.; Sklorz, A.; Benecke, W.; Lang, W.
Development and Optimization of ICP-RIE Parameters for Deep Silicon Microfluidic Systems
In: 19th MME Europe Workshop. 2008,
(Workgroup: IMSAS)

@inproceedings{Ala08a,
author = {Alamin, A. B. and Sklorz, A. and Benecke, W. and Lang, W.},
title = {Development and Optimization of ICP-RIE Parameters for Deep Silicon Microfluidic Systems},
booktitle = {19th MME Europe Workshop},
year = {2008},
editor = {},
publisher = {},
doi = {},
pages = {}
}

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Contributions to Conferences

Development and Optimization of ICP-RIE Parameters for Deep Silicon Microfluidic Systems

Authors

Meta information [BibTeX]